An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Control of MEMS Coriolis Vibratory Gyroscopes

This application note gives an overview of different control mechanisms for MEMS Coriolis Vibratory Gyroscopes (CVG) and how they are implemented using the commercial off-the-shelf HF2LI Lock-in Amplifier. A MEMS gyroscope is a micro-machined inertial device that can measure the angle of orientation or the angular rate of rotation. The principle relies on a vibrating structure that is suspended...

متن کامل

Model-based control concepts for vibratory MEMS gyroscopes

In this contribution, a systematic method for the design of openand closedloop controllers for vibratory MEMS gyroscopes based on so-called envelope models will be presented. The methodology will be exemplarily carried out for a gyroscope with electrostatic actuation and read-out elements. The specifically designed capacitive actuators of the gyroscope are capable of compensating the system’s i...

متن کامل

Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes

In this paper a Cross Axis evaluation methodology is presented. The Cross Axis Sensitivity value depends on backend testing position tolerances as well as technological features and design properties of the MEMS gyroscope. A numerical model was developed to take into account the sources of cross axis related to the last two contributions, not considering backend tolerances. Given a specific str...

متن کامل

Active Structural Error Suppression in MEMS Vibratory Rate Integrating Gyroscopes

Due to restrictive tolerancing in microfabrication, structural imperfections that reduce performance of fabricated micro devices are typical. In microelectromechanical vibratory gyroscopes, feedback control is a common strategy in attempting to correct the imperfections. However, a purely feedback control can be insufficient for compensation of all the errors, requiring post processing in the f...

متن کامل

Closed-Loop Compensation of the Quadrature Error in MEMS Vibratory Gyroscopes

In this paper, a simple but effective method for compensation of the quadrature error in MEMS vibratory gyroscope is provided. The proposed method does not require any change in the sensor structure, or additional circuit in the feedback path. The mathematical relations of the proposed feedback readout system were analyzed and the proposed solution assures good rejection capabilities. Based on ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Micromachines

سال: 2019

ISSN: 2072-666X

DOI: 10.3390/mi10040270